Magnetron Sputtering of Ferromagnetic Material using a Target with Ditches
نویسندگان
چکیده
منابع مشابه
The Target Material Influence on the Current Pulse during High Power Pulsed Magnetron Sputtering
The current-time characteristic during high power pulsed magnetron sputtering is measured under identical conditions for seventeen different target materials. Based on physical processes such as gas rarefaction, ion-induced electron emission, and electron impact ionization, two test parameters were derived that significantly correlate with specific features of the current-time characteristic: (...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Fundamentals and Materials
سال: 1980
ISSN: 0385-4205,1347-5533
DOI: 10.1541/ieejfms1972.100.249